Joule Expansion Imaging Techniques on Microlectronic Devices
Language
en
Communication dans un congrès
This item was published in
13th International Worshop on THERMal INvestigations of ICs and Systems, 13th International Worshop on THERMal INvestigations of ICs and Systems, THERMINIC 2007, 2007-09, Budapest. 2007-09p. 174-179
EDA Publishing
English Abstract
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. ...Read more >
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.Read less <
English Keywords
Scanning Thermal imaging
interferometry
Joule expansion
Origin
Hal imported