Joule Expansion Imaging Techniques on Microlectronic Devices
Langue
en
Communication dans un congrès
Ce document a été publié dans
13th International Worshop on THERMal INvestigations of ICs and Systems, 13th International Worshop on THERMal INvestigations of ICs and Systems, THERMINIC 2007, 2007-09, Budapest. 2007-09p. 174-179
EDA Publishing
Résumé en anglais
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. ...Lire la suite >
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.< Réduire
Mots clés en anglais
Scanning Thermal imaging
interferometry
Joule expansion
Origine
Importé de halUnités de recherche