Afficher la notice abrégée

Joule Expansion Imaging Techniques on Microlectronic Devices

hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, S.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorPATINO LOPEZ, , L.-D.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorSALHI, A.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorPUYOO, E.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorRAMPNOUX, J.-M.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
dc.date.issued2007-09
dc.date.conference2007-09
dc.description.abstractEnWe have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.
dc.language.isoen
dc.publisherEDA Publishing
dc.source.title13th International Worshop on THERMal INvestigations of ICs and Systems
dc.subject.enScanning Thermal imaging
dc.subject.eninterferometry
dc.subject.enJoule expansion
dc.titleJoule Expansion Imaging Techniques on Microlectronic Devices
dc.typeCommunication dans un congrès
dc.subject.halPhysique [physics]/Matière Condensée [cond-mat]/Science des matériaux [cond-mat.mtrl-sci]
dc.identifier.arxiv0801.1041
bordeaux.page174-179
bordeaux.conference.titleTHERMINIC 2007
bordeaux.countryHU
bordeaux.title.proceeding13th International Worshop on THERMal INvestigations of ICs and Systems
bordeaux.conference.cityBudapest
bordeaux.peerReviewedoui
hal.identifierhal-00202556
hal.version1
hal.invitednon
hal.proceedingsoui
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00202556v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.title=Joule%20Expansion%20Imaging%20Techniques%20on%20Microlectronic%20Devices&rft.btitle=13th%20International%20Worshop%20on%20THERMal%20INvestigations%20of%20ICs%20and%20Systems&rft.atitle=Joule%20Expansion%20Imaging%20Techniques%20on%20Microlectronic%20Devices&rft.date=2007-09&rft.spage=174-179&rft.epage=174-179&rft.au=GRAUBY,%20S.&PATINO%20LOPEZ,%20,%20L.-D.&SALHI,%20A.&PUYOO,%20E.&RAMPNOUX,%20J.-M.&rft.genre=unknown


Fichier(s) constituant ce document

FichiersTailleFormatVue

Il n'y a pas de fichiers associés à ce document.

Ce document figure dans la(les) collection(s) suivante(s)

Afficher la notice abrégée