Joule Expansion Imaging Techniques on Microlectronic Devices

GRAUBY, S.; PATINO LOPEZ, , L.-D.; SALHI, A.; PUYOO, E.; RAMPNOUX, J.-M.; CLAEYS, W.; DILHAIRE, S.

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GRAUBY, S.
Centre de physique moléculaire optique et hertzienne [CPMOH]

PATINO LOPEZ, , L.-D.
Centre de physique moléculaire optique et hertzienne [CPMOH]

SALHI, A.
Centre de physique moléculaire optique et hertzienne [CPMOH]

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Communication dans un congrès

Este ítem está publicado en

13th International Worshop on THERMal INvestigations of ICs and Systems, 13th International Worshop on THERMal INvestigations of ICs and Systems, THERMINIC 2007, 2007-09, Budapest. 2007-09p. 174-179

EDA Publishing

Resumen en inglés

We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.< Leer menos

Palabras clave en inglés

Scanning Thermal imaging

interferometry

Joule expansion

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Importado de Hal

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Laboratoire Ondes et Matière d'Aquitaine (LOMA) - UMR 5798