Nano-proximity direct ion beam writing
SENIUTINAS, Gediminas
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
GERVINSKAS, Gediminas
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
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Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
SENIUTINAS, Gediminas
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
GERVINSKAS, Gediminas
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
HAKOBYAN, Davit
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
Laboratoire Ondes et Matière d'Aquitaine [LOMA]
< Reduce
Centre for Micro-Photonics [Hawthorn]
Melbourne Centre for Nanofabrication [MCN]
Laboratoire Ondes et Matière d'Aquitaine [LOMA]
Language
en
Article de revue
This item was published in
Nanofabrication. 2015, vol. 2, n° 1, p. 54-62
De Gruyter
English Abstract
Focused ion beam (FIB) milling with a 10 nm resolution is used to directly write metallic metasurfaces and micro-optical elements capable to create structured light fields. Surface density of fabricated nano-features, their ...Read more >
Focused ion beam (FIB) milling with a 10 nm resolution is used to directly write metallic metasurfaces and micro-optical elements capable to create structured light fields. Surface density of fabricated nano-features, their edge steepness as well as ion implantation extension around the cut line depend on the ion beam intensity profile. The FIB beam intensity cross section was evaluated using atomic force microscopy (AFM) scans of milled line arrays on a thin Pt film. Approximation of two Gaussian intensity distributions describes the actual beam profile composed of central high intensity part and peripheral wings. FIB fabrication reaching aspect ratio of 10 in gold film is demonstrated.Read less <
English Keywords
Ga ion beam milling
Nanofabrication
structured light
ANR Project
Initiative d'excellence de l'Université de Bordeaux
Origin
Hal imported