Fast Laser Scanning Imaging System for Surface Displacement Measurements
Idioma
en
Article de revue
Este ítem está publicado en
IEEE Electron Device Letters. 2009-02-25, vol. 30, n° 3, p. 222-224
Institute of Electrical and Electronics Engineers
Resumen en inglés
We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic ...Leer más >
Palabras clave en inglés
Displacement measurement
electronics
imaging
interferometry