Fast Laser Scanning Imaging System for Surface Displacement Measurements
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | GRAUBY, Stéphane | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | SALHI, Amine | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | RAMPNOUX, Jean-Michel | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | CLAEYS, Wilfrid | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | DILHAIRE, Stefan | |
| dc.date.created | 2008-11-24 | |
| dc.date.issued | 2009-02-25 | |
| dc.identifier.issn | 0741-3106 | |
| dc.description.abstractEn | We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic devices. The use of galvanometric mirrors coupled to the heterodyne probe makes it a sensitive and fast measurement system. We present results on a microelectronic device, and we compare the performances of this system with point and CCD interferometry imaging setups. | |
| dc.language.iso | en | |
| dc.publisher | Institute of Electrical and Electronics Engineers | |
| dc.subject.en | Displacement measurement | |
| dc.subject.en | electronics | |
| dc.subject.en | imaging | |
| dc.subject.en | interferometry | |
| dc.title.en | Fast Laser Scanning Imaging System for Surface Displacement Measurements | |
| dc.type | Article de revue | |
| dc.identifier.doi | 10.1109/LED.2008.2012177 | |
| bordeaux.journal | IEEE Electron Device Letters | |
| bordeaux.page | 222-224 | |
| bordeaux.volume | 30 | |
| bordeaux.issue | 3 | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-00506112 | |
| hal.version | 1 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-00506112v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=IEEE%20Electron%20Device%20Letters&rft.date=2009-02-25&rft.volume=30&rft.issue=3&rft.spage=222-224&rft.epage=222-224&rft.eissn=0741-3106&rft.issn=0741-3106&rft.au=GRAUBY,%20St%C3%A9phane&SALHI,%20Amine&RAMPNOUX,%20Jean-Michel&CLAEYS,%20Wilfrid&DILHAIRE,%20Stefan&rft.genre=article |
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