Fast Laser Scanning Imaging System for Surface Displacement Measurements
Language
en
Article de revue
This item was published in
IEEE Electron Device Letters. 2009-02-25, vol. 30, n° 3, p. 222-224
Institute of Electrical and Electronics Engineers
English Abstract
We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic ...Read more >
We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic devices. The use of galvanometric mirrors coupled to the heterodyne probe makes it a sensitive and fast measurement system. We present results on a microelectronic device, and we compare the performances of this system with point and CCD interferometry imaging setups.Read less <
English Keywords
Displacement measurement
electronics
imaging
interferometry
Origin
Hal imported