Fast Laser Scanning Imaging System for Surface Displacement Measurements
Langue
en
Article de revue
Ce document a été publié dans
IEEE Electron Device Letters. 2009-02-25, vol. 30, n° 3, p. 222-224
Institute of Electrical and Electronics Engineers
Résumé en anglais
We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic ...Lire la suite >
Mots clés en anglais
Displacement measurement
electronics
imaging
interferometry