Study of mechanisms involved in photoresist microlens formation
Langue
en
Article de revue
Ce document a été publié dans
Microelectronic Engineering. 2006, vol. 83, n° 4-9, p. 1087-1090
Elsevier
Résumé en anglais
The mechanisms involved in photoresist microlens formation are investigated in order to understand the lack of sphericity of certain experimental microlenses. A characterization of the resist rheological properties has ...Lire la suite >
Mots clés en anglais
crosslinking
rheological properties
microlens
reflow method