MICHAUD, Jean François; PORTAIL, Marc; ALQUIER, Daniel; CERTON, Dominique; DUFOUR, Isabelle

doi:10.1016/j.mssp.2023.107986

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MICHAUD, Jean François
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]

PORTAIL, Marc
Centre de recherche sur l'hétéroepitaxie et ses applications [CRHEA]

ALQUIER, Daniel
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]

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Article de revue

Ce document a été publié dans

Materials Science in Semiconductor Processing. 2024-03-01, vol. 171, p. 107986

Résumé en anglais

Gas sensors are devices that can detect and/or discriminate gases in their surroundings. Some of these devices are based on vibrating structure covered with a coating sensitive to the species to detect. But such a layer can cause device failures issues like ageing, low reliability and high response time. Nonetheless, gas sensors are of importance for industrial environments in many applications. In addition, in some cases, the sensors must operate in harsh environments, that can lead to a severe degradation of the devices. In this paper, we propose to review different MEMS devices, without any sensitive layer, for gas detection applications. The objective is to measure a physical property of the gas in order to determine its concentration. With the microsystem devices, limits of detection as low as 0.2 % has been obtained, illustrating the capabilities of the structures elaborated. And in our case, due to the absence of sensitive film that must be adapted according to the species to detect, it leads to generic sensors, compatible with many different gases. Moreover, by combining the measures of 2 physical parameters, the discrimination of the gases, with their respective concentrations, is accessible.< Réduire

Mots clés

3C-SiC

MEMS

Microcantilevers

Physical gas detection

Hydrogen sensor

Time-of-flight

URI

https://oskar-bordeaux.fr/handle/20.500.12278/186193

DOI

http://dx.doi.org/10.1016/j.mssp.2023.107986

Project ANR

Mesure des propriétés physIques des Gaz à l'aide de MEMS résoNnants pour la détectiON chimique en milieu hostile - ANR-22-CE42-0012

Unités de recherche

IMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218