Silicon-carbide-based MEMS for gas detection applications
MICHAUD, Jean François
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
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GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
MICHAUD, Jean François
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
< Leer menos
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
Idioma
EN
Article de revue
Este ítem está publicado en
Materials Science in Semiconductor Processing. 2024-03-01, vol. 171, p. 107986
Resumen en inglés
Gas sensors are devices that can detect and/or discriminate gases in their surroundings. Some of these devices are based on vibrating structure covered with a coating sensitive to the species to detect. But such a layer ...Leer más >
Gas sensors are devices that can detect and/or discriminate gases in their surroundings. Some of these devices are based on vibrating structure covered with a coating sensitive to the species to detect. But such a layer can cause device failures issues like ageing, low reliability and high response time. Nonetheless, gas sensors are of importance for industrial environments in many applications. In addition, in some cases, the sensors must operate in harsh environments, that can lead to a severe degradation of the devices. In this paper, we propose to review different MEMS devices, without any sensitive layer, for gas detection applications. The objective is to measure a physical property of the gas in order to determine its concentration. With the microsystem devices, limits of detection as low as 0.2 % has been obtained, illustrating the capabilities of the structures elaborated. And in our case, due to the absence of sensitive film that must be adapted according to the species to detect, it leads to generic sensors, compatible with many different gases. Moreover, by combining the measures of 2 physical parameters, the discrimination of the gases, with their respective concentrations, is accessible.< Leer menos
Palabras clave
3C-SiC
MEMS
Microcantilevers
Physical gas detection
Hydrogen sensor
Time-of-flight
Proyecto ANR
Mesure des propriétés physIques des Gaz à l'aide de MEMS résoNnants pour la détectiON chimique en milieu hostile - ANR-22-CE42-0012
Centros de investigación