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Silicon-carbide-based MEMS for gas detection applications

dc.rights.licenseopenen_US
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorMICHAUD, Jean François
hal.structure.identifierCentre de recherche sur l'hétéroepitaxie et ses applications [CRHEA]
dc.contributor.authorPORTAIL, Marc
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorALQUIER, Daniel
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorCERTON, Dominique
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDUFOUR, Isabelle
IDREF: 069722633
dc.date.accessioned2023-11-28T08:32:24Z
dc.date.available2023-11-28T08:32:24Z
dc.date.issued2024-03-01
dc.identifier.issn1369-8001en_US
dc.identifier.urioai:crossref.org:10.1016/j.mssp.2023.107986
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/186193
dc.description.abstractEnGas sensors are devices that can detect and/or discriminate gases in their surroundings. Some of these devices are based on vibrating structure covered with a coating sensitive to the species to detect. But such a layer can cause device failures issues like ageing, low reliability and high response time. Nonetheless, gas sensors are of importance for industrial environments in many applications. In addition, in some cases, the sensors must operate in harsh environments, that can lead to a severe degradation of the devices. In this paper, we propose to review different MEMS devices, without any sensitive layer, for gas detection applications. The objective is to measure a physical property of the gas in order to determine its concentration. With the microsystem devices, limits of detection as low as 0.2 % has been obtained, illustrating the capabilities of the structures elaborated. And in our case, due to the absence of sensitive film that must be adapted according to the species to detect, it leads to generic sensors, compatible with many different gases. Moreover, by combining the measures of 2 physical parameters, the discrimination of the gases, with their respective concentrations, is accessible.
dc.description.sponsorshipMesure des propriétés physIques des Gaz à l'aide de MEMS résoNnants pour la détectiON chimique en milieu hostile - ANR-22-CE42-0012en_US
dc.language.isoENen_US
dc.sourcecrossref
dc.subject3C-SiC
dc.subjectMEMS
dc.subjectMicrocantilevers
dc.subjectPhysical gas detection
dc.subjectHydrogen sensor
dc.subjectTime-of-flight
dc.title.enSilicon-carbide-based MEMS for gas detection applications
dc.title.alternativeMSSPen_US
dc.typeArticle de revueen_US
dc.identifier.doi10.1016/j.mssp.2023.107986en_US
dc.subject.halSciences de l'ingénieur [physics]en_US
bordeaux.journalMaterials Science in Semiconductor Processingen_US
bordeaux.page107986en_US
bordeaux.volume171en_US
bordeaux.institutionUniversité de Bordeauxen_US
bordeaux.institutionBordeaux INPen_US
bordeaux.institutionCNRSen_US
bordeaux.teamORGANICS ELECTRONICS-PRIMSen_US
bordeaux.peerReviewedouien_US
bordeaux.inpressnonen_US
bordeaux.identifier.funderIDAgence Nationale pour la Gestion des Déchets Radioactifsen_US
bordeaux.import.sourcedissemin
hal.popularnonen_US
hal.audienceInternationaleen_US
hal.exportfalse
workflow.import.sourcedissemin
dc.rights.ccPas de Licence CCen_US
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Materials%20Science%20in%20Semiconductor%20Processing&rft.date=2024-03-01&rft.volume=171&rft.spage=107986&rft.epage=107986&rft.eissn=1369-8001&rft.issn=1369-8001&rft.au=MICHAUD,%20Jean%20Fran%C3%A7ois&PORTAIL,%20Marc&ALQUIER,%20Daniel&CERTON,%20Dominique&DUFOUR,%20Isabelle&rft.genre=article


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