H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility, 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2022-04-24, Paris. 2022-04p. 1-2
Résumé en anglais
SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring ...Lire la suite >
SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer. For this purpose, resonant microcantilevers and CMUT were used.< Réduire
Mots clés
Resonant MEMS
CMUT
Microcantilever
Gas detection
Resonant frequency
Quality factor
Time of flight
Viscosity
Mass density
Sound attenuation
Hydrogen detection
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