DUFOUR, Isabelle; IGLESIAS HERNANDEZ, Luis; SHANMUGAM, Priyadarshini; MICHAUD, Jean-François; COLIN, Laurent; ALQUIER, Daniel; CERTON, Dominique; MANRIQUE-JUAREZ, Maria-Dolores; LEICHLE, Thierry; MATHIEU, Fabrice; MAZENQ, Laurent; NICU, Liviu; NGUYEN, Luan; CHENOT, Sébastien; PORTAIL, Marc; BERTRAND, Johan

doi:10.1109/EFTF/IFCS54560.2022.9850611

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DUFOUR, Isabelle
Laboratoire de l'intégration, du matériau au système [IMS]

IGLESIAS HERNANDEZ, Luis

Laboratoire de l'intégration, du matériau au système [IMS]

SHANMUGAM, Priyadarshini

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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility, 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2022-04-24, Paris. 2022-04p. 1-2

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SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer. For this purpose, resonant microcantilevers and CMUT were used.< Leer menos

Palabras clave

Resonant MEMS

CMUT

Microcantilever

Gas detection

Resonant frequency

Quality factor

Time of flight

Viscosity

Mass density

Sound attenuation

Hydrogen detection