H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
Language
EN
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility, 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2022-04-24, Paris. 2022-04p. 1-2
English Abstract
SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring ...Read more >
SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer. For this purpose, resonant microcantilevers and CMUT were used.Read less <
Keywords
Resonant MEMS
CMUT
Microcantilever
Gas detection
Resonant frequency
Quality factor
Time of flight
Viscosity
Mass density
Sound attenuation
Hydrogen detection