Thermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification
Langue
en
Article de revue
Ce document a été publié dans
Microelectronics Reliability. 1998-04, vol. 29, n° 4-5, p. 181-190
Elsevier
Résumé en anglais
An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application ...Lire la suite >
An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application to the case of Joule heating of micrometric interconnections on submicron insulation layers permits one to identify thermophysical properties of the materials involved.< Réduire
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