Thermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | PHAN, T. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | DILHAIRE, S. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | QUINTARD, V. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | CLAEYS, W. | |
| hal.structure.identifier | Laboratoire Energétique et Phénomènes de Transfert [Talence] [LEPT] | |
| dc.contributor.author | BATSALE, J. C. | |
| dc.date.issued | 1998-04 | |
| dc.identifier.issn | 0026-2714 | |
| dc.description.abstractEn | An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application to the case of Joule heating of micrometric interconnections on submicron insulation layers permits one to identify thermophysical properties of the materials involved. | |
| dc.language.iso | en | |
| dc.publisher | Elsevier | |
| dc.title.en | Thermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification | |
| dc.type | Article de revue | |
| dc.identifier.doi | 10.1016/s0026-2692(97)00056-6 | |
| dc.subject.hal | Physique [physics] | |
| bordeaux.journal | Microelectronics Reliability | |
| bordeaux.page | 181-190 | |
| bordeaux.volume | 29 | |
| bordeaux.issue | 4-5 | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-01550255 | |
| hal.version | 1 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-01550255v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Microelectronics%20Reliability&rft.date=1998-04&rft.volume=29&rft.issue=4-5&rft.spage=181-190&rft.epage=181-190&rft.eissn=0026-2714&rft.issn=0026-2714&rft.au=PHAN,%20T.&DILHAIRE,%20S.&QUINTARD,%20V.&CLAEYS,%20W.&BATSALE,%20J.%20C.&rft.genre=article |
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