Thermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification
Language
en
Article de revue
This item was published in
Microelectronics Reliability. 1998-04, vol. 29, n° 4-5, p. 181-190
Elsevier
English Abstract
An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application ...Read more >
An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application to the case of Joule heating of micrometric interconnections on submicron insulation layers permits one to identify thermophysical properties of the materials involved.Read less <
Origin
Hal imported