Thermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification
Idioma
en
Article de revue
Este ítem está publicado en
Microelectronics Reliability. 1998-04, vol. 29, n° 4-5, p. 181-190
Elsevier
Resumen en inglés
An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application ...Leer más >
An analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application to the case of Joule heating of micrometric interconnections on submicron insulation layers permits one to identify thermophysical properties of the materials involved.< Leer menos
Orígen
Importado de HalCentros de investigación