Calibration procedure for temperature measurements by thermoreflectance under high magnification conditions
Language
en
Article de revue
This item was published in
Applied Physics Letters. 2004-02-02, vol. 84, n° 5, p. 822-824
American Institute of Physics
English Abstract
We show that, in thermoreflectance measurements under high focusing conditions, the signal is not only due to the surface temperature variations. Indeed, the reflected light from the device under test interferes with the ...Read more >
We show that, in thermoreflectance measurements under high focusing conditions, the signal is not only due to the surface temperature variations. Indeed, the reflected light from the device under test interferes with the incoming one, making a parasitic Fabry-Pérot. Besides, the motion of the sample surface induced, for example, by Joule heating, can produce an additional signal superimposed on the thermoreflectance one. Consequently, reliable thermoreflectance measurements under high focusing conditions, and particularly their calibration, demand a control of the distance between the objective and the sample. Using a servo loop to maintain the distance between the objective and the device constant, thermoreflectance measurements have been made in transient regime on an electronic device and the thermoreflectance coefficient of gold has been deduced.Read less <
English Keywords
Optical metrology
Electronic devices
Transition metals
Thermodynamic states and processes
Origin
Hal imported