Calibration procedure for temperature measurements by thermoreflectance under high magnification conditions
Idioma
en
Article de revue
Este ítem está publicado en
Applied Physics Letters. 2004-02-02, vol. 84, n° 5, p. 822-824
American Institute of Physics
Resumen en inglés
We show that, in thermoreflectance measurements under high focusing conditions, the signal is not only due to the surface temperature variations. Indeed, the reflected light from the device under test interferes with the ...Leer más >
Palabras clave en inglés
Optical metrology
Electronic devices
Transition metals
Thermodynamic states and processes