Temperature variation mapping of a microelectromechanical system by thermoreflectance imaging
Language
en
Article de revue
This item was published in
IEEE Electron Device Letters. 2005-02, vol. 26, n° 2, p. 78-80
Institute of Electrical and Electronics Engineers
English Abstract
We present in this letter a cost effective noncontact imaging technique well adapted to measure the temperature variations on microelectromechanical systems. The setup is tested on a microheater constituted of a polysilicon ...Read more >
We present in this letter a cost effective noncontact imaging technique well adapted to measure the temperature variations on microelectromechanical systems. The setup is tested on a microheater constituted of a polysilicon resistor deposited on a dielectric membrane. Results concerning the temperature variations of this device are compared on one hand with simulation predictions, and on the other hand with thermoreflectance point measurements. From thermoreflectance images, we also estimate the values of the thermoreflectance coefficients of the polysilicon and of the dielectric.Read less <
Origin
Hal imported