Study of thermomechanical properties of Si/SiGe superlattices using femtosecond transient thermoreflectance technique
Language
en
Article de revue
This item was published in
Applied Physics Letters. 2005-09-05, vol. 87, n° 10, p. 103506 (1-3)
American Institute of Physics
English Abstract
Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and ...Read more >
Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and allows us to determine the cross-plan thermal conductivity of the superlattices at room temperature. We also show that, from the experimental curve, we can extract the thickness of the metallic film, the longitudinal sound velocity and the refractive index of the superlattice using acoustic echoes and Brillouin oscillation data.Read less <
English Keywords
Acoustical properties
Thin films
Chemical elements
Semiconductors
Thermomechanical analysis
Acoustic phenomena
Optical metrology
Superlattices
Thermal conductivity
Optical properties
Origin
Hal imported