Study of thermomechanical properties of Si/SiGe superlattices using femtosecond transient thermoreflectance technique
Idioma
en
Article de revue
Este ítem está publicado en
Applied Physics Letters. 2005-09-05, vol. 87, n° 10, p. 103506 (1-3)
American Institute of Physics
Resumen en inglés
Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and ...Leer más >
Palabras clave en inglés
Acoustical properties
Thin films
Chemical elements
Semiconductors
Thermomechanical analysis
Acoustic phenomena
Optical metrology
Superlattices
Thermal conductivity
Optical properties