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Dynamic characterization of SiO2-Au microcantilevers using Michelson interferometer
Language
en
Chapitre d'ouvrage
This item was published in
Smart Sensors, Actuators, and Mems, Pts 1 and 2, Smart Sensors, Actuators, and Mems, Pts 1 and 2. 2003, vol. 5116, p. 406-413
Origin
Hal imported