Joule expansion imaging techniques on microlectronic devices
Language
en
Article de revue
This item was published in
Microelectronics Journal. 2009-09, vol. 40, n° 9, p. 1367-1372
Elsevier
English Abstract
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using scanning Joule expansion microscopy (SJEM). We present the experimental method and surface displacement results. ...Read more >
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using scanning Joule expansion microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using scanning thermal microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements. The performances of the three methods are compared.Read less <
Keywords
Microelectronic devices
Temperature variations
Joule expansion
Displacement
ANR Project
Conception, fabrication et EXploration d'un TRAnsistor nanométrique sur un SOI avec un Diélectrique Alternatif contraint à forte conductivité thermique - ANR-06-NANO-0042
Origin
Hal imported