ZnO homoepitaxy on the O polar face of hydrothermal and melt-growth substrates by pulsed laser deposition
Langue
en
Article de revue
Ce document a été publié dans
Applied physics. A, Materials science & processing. 2007, vol. 88, n° 1, p. 49-56
Springer Verlag
Résumé en anglais
2 cm diameter hydrothermal ZnO crystals were grown and then made into substrates using both mechanical and chemical-mechanical polishing (CMP). CMP polishing showed superior results with an (0002) Ω scan full width half ...Lire la suite >
Mots clés en anglais
Chemical Mechanical Polishing
Full Width Half Maximum
Hydrothermal crystal growth
Glow Discharge Mass Spectroscopy
Root Mean Square Roughness
Polar Face