Influence of sputtering conditions on ionic conductivity of LiPON thin films
HAMON, Yohann
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
CEA Le Ripault [CEA Le Ripault]
See more >
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
CEA Le Ripault [CEA Le Ripault]
HAMON, Yohann
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
CEA Le Ripault [CEA Le Ripault]
< Reduce
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
CEA Le Ripault [CEA Le Ripault]
Language
en
Article de revue
This item was published in
Solid State Ionics. 2006, vol. vol. 177, n° 3-4, p. p. 257-261
Elsevier
English Abstract
LiPON films were deposited using radio-frequency magnetron sputtering in a pure N2 gas atmosphere. The influence of rf power, N2 pressure, target–substrate distance and target density on thin film composition and ionic ...Read more >
LiPON films were deposited using radio-frequency magnetron sputtering in a pure N2 gas atmosphere. The influence of rf power, N2 pressure, target–substrate distance and target density on thin film composition and ionic conductivity has been studied. Impedance measurements performed between 25 and 80 °C have indicated that ionic conductivity increases with nitrogen incorporation into the glass structure. An increase in the deposition rate with the target density has also been observed.Read less <
English Keywords
Solid electrolyte
Thin films
Ionic conductivity
Sputtering target density
Origin
Hal imported