A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers
SHANMUGAM, Priyadarshini
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
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GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
SHANMUGAM, Priyadarshini
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
MICHAUD, Jean François
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
< Reduce
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
Language
EN
Communication dans un congrès avec actes
This item was published in
13th European Conference on Silicon Carbide and Related Materials, ECSCRM 2020·2021, 2021-10-24, Tours. 2022-05-31, vol. 1062, p. 593-597
English Abstract
This paper demonstrates the ability of 3CSiC microcantilevers (μCs) to monitor binary gas mixture without sensitive coating. Here, 3CSiC is chosen in particular, as the newly designed sensor will be placed in a radioactive ...Read more >
This paper demonstrates the ability of 3CSiC microcantilevers (μCs) to monitor binary gas mixture without sensitive coating. Here, 3CSiC is chosen in particular, as the newly designed sensor will be placed in a radioactive environment. The change in gas concentration is identified using relative shifts in the cantilever’s mechanical resonance frequency (∆ f r ). The presented microcantilevers work on electromagnetic actuation and inductive detection. In this paper, the fabrication process, optical characterization results using laser Doppler vibrometry and test results under a gas mixture environment are demonstrated. The presented limit of detection shows the ability of 3CSiCμCs to detect less than 1% of hydrogen in nitrogen, which makes them suitable for the targeted application.Read less <
English Keywords
Silicon carbide
3C-SiC microcantilevers
physical gas detector
hydrogen sensor
MEMS
electromagnetic actuation and inductive detection