SHANMUGAM, Priyadarshini; IGLESIAS, Luis; PORTAIL, Marc; DUFOUR, Isabelle; CERTON, Dominique; ALQUIER, Daniel; MICHAUD, Jean François

doi:10.4028/p-m048qs

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IMS_MSF_Igledias_2022.pdf (674.9Kb)

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SHANMUGAM, Priyadarshini
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]

IGLESIAS, Luis
Laboratoire de l'intégration, du matériau au système [IMS]

PORTAIL, Marc
Centre de recherche sur l'hétéroepitaxie et ses applications [CRHEA]

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Communication dans un congrès avec actes

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13th European Conference on Silicon Carbide and Related Materials, ECSCRM 2020·2021, 2021-10-24, Tours. 2022-05-31, vol. 1062, p. 593-597

Resumen en inglés

This paper demonstrates the ability of 3CSiC microcantilevers (μCs) to monitor binary gas mixture without sensitive coating. Here, 3CSiC is chosen in particular, as the newly designed sensor will be placed in a radioactive environment. The change in gas concentration is identified using relative shifts in the cantilever’s mechanical resonance frequency (∆ f r ). The presented microcantilevers work on electromagnetic actuation and inductive detection. In this paper, the fabrication process, optical characterization results using laser Doppler vibrometry and test results under a gas mixture environment are demonstrated. The presented limit of detection shows the ability of 3CSiCμCs to detect less than 1% of hydrogen in nitrogen, which makes them suitable for the targeted application.< Leer menos

Palabras clave en inglés

Silicon carbide

3C-SiC microcantilevers

physical gas detector

hydrogen sensor

MEMS

electromagnetic actuation and inductive detection