Browsing IMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218 by Author "ALQUIER, Daniel"
Now showing items 1-4 of 4
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H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
DUFOUR, Isabelle; IGLESIAS HERNANDEZ, Luis; SHANMUGAM, Priyadarshini ...(H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility, 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), fr, Paris, 2022-04)Communication dans un congrès avec actesOpen access -
Gas discrimination by simultaneous sound velocity and attenuation measurements using uncoated capacitive micromachined ultrasonic transducers
IGLESIAS HERNANDEZ, Luis; SHANMUGAM, Priyadarshini; MICHAUD, Jean-François ...(Scientific Reports. vol. 12, n° 1, 2022-01-14)Article de revueOpen access -
A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers
SHANMUGAM, Priyadarshini; IGLESIAS, Luis; PORTAIL, Marc ...(13th European Conference on Silicon Carbide and Related Materials, ECSCRM 2020·2021, fr, Tours, 2022-05-31)Communication dans un congrès avec actesOpen access -
Silicon-carbide-based MEMS for gas detection applications
MICHAUD, Jean François; PORTAIL, Marc; ALQUIER, Daniel ...(Materials Science in Semiconductor Processing. vol. 171, pp. 107986, 2024-03-01)Article de revueRequest a copy