DILHAIRE, S.; GRAUBY, Stéphane; CLAEYS, W.

doi:10.1063/1.1645326

Métadonnées

Afficher la notice complète

Licence d’utilisation du document

DILHAIRE, S.
Centre de physique moléculaire optique et hertzienne [CPMOH]

GRAUBY, Stéphane
Centre de physique moléculaire optique et hertzienne [CPMOH]

CLAEYS, W.
Centre de physique moléculaire optique et hertzienne [CPMOH]

Langue

Article de revue

Ce document a été publié dans

Applied Physics Letters. 2004-02-02, vol. 84, n° 5, p. 822-824

American Institute of Physics

Résumé en anglais

We show that, in thermoreflectance measurements under high focusing conditions, the signal is not only due to the surface temperature variations. Indeed, the reflected light from the device under test interferes with the incoming one, making a parasitic Fabry-Pérot. Besides, the motion of the sample surface induced, for example, by Joule heating, can produce an additional signal superimposed on the thermoreflectance one. Consequently, reliable thermoreflectance measurements under high focusing conditions, and particularly their calibration, demand a control of the distance between the objective and the sample. Using a servo loop to maintain the distance between the objective and the device constant, thermoreflectance measurements have been made in transient regime on an electronic device and the thermoreflectance coefficient of gold has been deduced.< Réduire

Mots clés en anglais

Optical metrology

Electronic devices

Transition metals

Thermodynamic states and processes

Métadonnées

Licence d’utilisation du document

Calibration procedure for temperature measurements by thermoreflectance under high magnification conditions

Langue

Ce document a été publié dans

Résumé en anglais

Mots clés en anglais

DOI

Origine

Unités de recherche