Study of thermomechanical properties of Si/SiGe superlattices using femtosecond transient thermoreflectance technique
Langue
en
Article de revue
Ce document a été publié dans
Applied Physics Letters. 2005-09-05, vol. 87, n° 10, p. 103506 (1-3)
American Institute of Physics
Résumé en anglais
Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and ...Lire la suite >
Mots clés en anglais
Acoustical properties
Thin films
Chemical elements
Semiconductors
Thermomechanical analysis
Acoustic phenomena
Optical metrology
Superlattices
Thermal conductivity
Optical properties