GRAUBY, S.; SALHI, A.; RAMPNOUX, Jean-Michel; MICHEL, Hélène; CLAEYS, W.; DILHAIRE, S.

doi:10.1063/1.2757473

Metadatos

Mostrar el registro completo del ítem

Licencia de uso del documento

GRAUBY, S.
Centre de physique moléculaire optique et hertzienne [CPMOH]

SALHI, A.
Centre de physique moléculaire optique et hertzienne [CPMOH]

RAMPNOUX, Jean-Michel
Centre de physique moléculaire optique et hertzienne [CPMOH]

Idioma

Article de revue

Este ítem está publicado en

Review of Scientific Instruments. 2007-07, vol. 78, n° 7, p. 074902 (1-8)

American Institute of Physics

Resumen en inglés

We present a thermoreflectance imaging system using a focused laser sweeping the device under test with a scanner made of galvanometric mirrors. We first show that the spatial resolution of this setup is submicrometric, which makes it adapted to microelectronic thermal measurements. Then, we studied qualitative temperature variations on two dissipative structures constituted of thin (0.35μm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10μm. This technique combines sensitivity and speed: it is faster than a point classical thermoreflectance technique and, in addition, more sensitive than a charge-coupled device thermoreflectance imaging technique.< Leer menos

Palabras clave en inglés

Charge coupled devices

Reflectivity

Optical images

Clocks

Spatial resolution

Thermal imaging

Mirrors

Resistors

Photodiodes

Amplifiers

Metadatos

Licencia de uso del documento

Laser scanning thermoreflectance imaging system using galvanometric mirrors for temperature measurements of microelectronic devices

Idioma

Este ítem está publicado en

Resumen en inglés

Palabras clave en inglés

DOI

Orígen

Centros de investigación