Laser scanning thermoreflectance imaging system using galvanometric mirrors for temperature measurements of microelectronic devices
Language
en
Article de revue
This item was published in
Review of Scientific Instruments. 2007-07, vol. 78, n° 7, p. 074902 (1-8)
American Institute of Physics
English Abstract
We present a thermoreflectance imaging system using a focused laser sweeping the device under test with a scanner made of galvanometric mirrors. We first show that the spatial resolution of this setup is submicrometric, ...Read more >
We present a thermoreflectance imaging system using a focused laser sweeping the device under test with a scanner made of galvanometric mirrors. We first show that the spatial resolution of this setup is submicrometric, which makes it adapted to microelectronic thermal measurements. Then, we studied qualitative temperature variations on two dissipative structures constituted of thin (0.35μm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10μm. This technique combines sensitivity and speed: it is faster than a point classical thermoreflectance technique and, in addition, more sensitive than a charge-coupled device thermoreflectance imaging technique.Read less <
English Keywords
Charge coupled devices
Reflectivity
Optical images
Clocks
Spatial resolution
Thermal imaging
Mirrors
Resistors
Photodiodes
Amplifiers
Origin
Hal imported