Laser Scanning Thermomechanical Imaging of Microelectronic Devices
Idioma
en
Communication dans un congrès
Este ítem está publicado en
2008-09-24, Rome. 2008p. 183-189
Resumen en inglés
We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance ...Leer más >
We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance imaging set-up leading to images of reflectivity relative variations proportional to the device surface temperature variations. Using an heterodyne interferometric probe, it becomes a scanning interferometric set-up leading to surface displacement images. Both thermoreflectance and interferometric images are presented for two samples.< Leer menos
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Importado de HalCentros de investigación