Laser Scanning Thermomechanical Imaging of Microelectronic Devices
Language
en
Communication dans un congrès
This item was published in
2008-09-24, Rome. 2008p. 183-189
English Abstract
We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance ...Read more >
We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance imaging set-up leading to images of reflectivity relative variations proportional to the device surface temperature variations. Using an heterodyne interferometric probe, it becomes a scanning interferometric set-up leading to surface displacement images. Both thermoreflectance and interferometric images are presented for two samples.Read less <
Origin
Hal imported