Qualitative Temperature Variation Imaging by Thermoreflectance and SThM Techniques
CHARLOT, B.
Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés [TIMA]
< Reduce
Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés [TIMA]
Language
en
Communication dans un congrès
This item was published in
THERMINIC 2005, 2005-09, Belgirate, Lago Maggiore. 2005-09p. 284-289
TIMA Editions
English Abstract
We have studied temperature variations on two dissipative structures with two different techniques. The dissipative structures are constituted of thin (0.35µm) dissipative resistors, the distance between two resistors being ...Read more >
We have studied temperature variations on two dissipative structures with two different techniques. The dissipative structures are constituted of thin (0.35µm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 µm. On one hand, we have used a thermoreflectance imaging technique which is a well-known non contact optical method to evaluate temperature variations but whose spatial resolution is limited by diffraction. On the other hand, we have used a Scanning Thermal Microscope (SThM) to study the thermal behaviour of these small dissipative structures. We compare qualitative results obtained by both methods and we present their advantages and limitations for temperature measurements on microelectronic devices.Read less <
English Keywords
Thermal imaging
spatial resolution
scanning thermal microscopy
Origin
Hal imported