ZnO homoepitaxy on the O polar face of hydrothermal and melt-growth substrates by pulsed laser deposition
hal.structure.identifier | Nanovation SARL | |
hal.structure.identifier | Laboratoire de Nanotechnologie et d'Instrumentation Optique [LNIO] | |
dc.contributor.author | ROGERS, David | |
hal.structure.identifier | Nanovation SARL | |
dc.contributor.author | HOSSEINI TEHERANI, F. | |
hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
dc.contributor.author | LARGETEAU, Alain | |
hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
dc.contributor.author | DEMAZEAU, Gérard | |
hal.structure.identifier | NOVASiC | |
dc.contributor.author | MOISSON, C. | |
hal.structure.identifier | NOVASiC | |
dc.contributor.author | TUROVER, D. | |
hal.structure.identifier | Cermet Inc. | |
dc.contributor.author | NAUSE, J. | |
hal.structure.identifier | Thales Research | |
dc.contributor.author | GARRY, G. | |
hal.structure.identifier | Department of Semiconductor Physics | |
dc.contributor.author | KLING, R. | |
hal.structure.identifier | Department of Semiconductor Physics | |
dc.contributor.author | GRUBER, T. | |
hal.structure.identifier | Institute of Semiconductor Technology | |
dc.contributor.author | WAAG, A. | |
hal.structure.identifier | Laboratoire de physique des solides et de cristallogénèse [LPSC] | |
dc.contributor.author | JOMARD, F. | |
hal.structure.identifier | Laboratoire de physique des solides et de cristallogénèse [LPSC] | |
dc.contributor.author | GALTIER, P. | |
hal.structure.identifier | Laboratoire de physique des solides et de cristallogénèse [LPSC] | |
dc.contributor.author | LUSSON, A. | |
hal.structure.identifier | Physics Department | |
dc.contributor.author | MONTEIRO, T. | |
hal.structure.identifier | Physics Department | |
dc.contributor.author | SOARES, M. J. | |
hal.structure.identifier | Physics Department | |
dc.contributor.author | NEVES, A. | |
hal.structure.identifier | Physics Department | |
dc.contributor.author | CARMO, M. C. | |
hal.structure.identifier | Physics Department | |
dc.contributor.author | PERES, M. | |
hal.structure.identifier | Laboratoire de Nanotechnologie et d'Instrumentation Optique [LNIO] | |
dc.contributor.author | LERONDEL, Gilles | |
hal.structure.identifier | Laboratoire de Nanotechnologie et d'Instrumentation Optique [LNIO] | |
dc.contributor.author | HUBERT, Christophe | |
dc.date.issued | 2007 | |
dc.identifier.issn | 0947-8396 | |
dc.description.abstractEn | 2 cm diameter hydrothermal ZnO crystals were grown and then made into substrates using both mechanical and chemical-mechanical polishing (CMP). CMP polishing showed superior results with an (0002) Ω scan full width half maximum (FWHM) of 67 arcsec and an root mean square (RMS) roughness of 2 Å. In comparison, commercial melt-grown substrates exhibited broader X-ray diffraction (XRD) linewidths with evidence of sub-surface crystal damage due to polishing, including a downward shift of c-lattice parameter... | |
dc.language.iso | en | |
dc.publisher | Springer Verlag | |
dc.subject.en | Chemical Mechanical Polishing | |
dc.subject.en | Full Width Half Maximum | |
dc.subject.en | Hydrothermal crystal growth | |
dc.subject.en | Glow Discharge Mass Spectroscopy | |
dc.subject.en | Root Mean Square Roughness | |
dc.subject.en | Polar Face | |
dc.title.en | ZnO homoepitaxy on the O polar face of hydrothermal and melt-growth substrates by pulsed laser deposition | |
dc.type | Article de revue | |
dc.identifier.doi | 10.1007/s00339-007-3975-z | |
dc.subject.hal | Chimie/Matériaux | |
bordeaux.journal | Applied physics. A, Materials science & processing | |
bordeaux.page | 49-56 | |
bordeaux.volume | 88 | |
bordeaux.issue | 1 | |
bordeaux.peerReviewed | oui | |
hal.identifier | hal-00155069 | |
hal.version | 1 | |
hal.popular | non | |
hal.audience | Internationale | |
hal.origin.link | https://hal.archives-ouvertes.fr//hal-00155069v1 | |
bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Applied%20physics.%20A,%20Materials%20science%20&%20processing&rft.date=2007&rft.volume=88&rft.issue=1&rft.spage=49-56&rft.epage=49-56&rft.eissn=0947-8396&rft.issn=0947-8396&rft.au=ROGERS,%20David&HOSSEINI%20TEHERANI,%20F.&LARGETEAU,%20Alain&DEMAZEAU,%20G%C3%A9rard&MOISSON,%20C.&rft.genre=article |
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