Ba0.6Sr0.4TiO3 thin films deposited by spray coating for high capacitance density capacitors
TETSI, Emmanuel
Université de Sherbrooke [UdeS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Laboratoire de l'intégration, du matériau au système [IMS]
See more >
Université de Sherbrooke [UdeS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Laboratoire de l'intégration, du matériau au système [IMS]
TETSI, Emmanuel
Université de Sherbrooke [UdeS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Laboratoire de l'intégration, du matériau au système [IMS]
Université de Sherbrooke [UdeS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Laboratoire de l'intégration, du matériau au système [IMS]
BECHOU, Laurent
Laboratoire de l'intégration, du matériau au système [IMS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Laboratoire de l'intégration, du matériau au système [IMS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
DROUIN, Dominique
Université de Sherbrooke [UdeS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke] [3IT]
< Reduce
Université de Sherbrooke [UdeS]
Laboratoire Nanotechnologies Nanosystèmes [LN2 ]
Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke] [3IT]
Language
en
Article de revue
This item was published in
physica status solidi (a). 2018-10, vol. 215, n° 23, p. 1800478 (11 p.)
Wiley
English Abstract
Metal‐insulator‐metal (MIM) capacitors with Ba0.6Sr0.4TiO3 (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable ...Read more >
Metal‐insulator‐metal (MIM) capacitors with Ba0.6Sr0.4TiO3 (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable synthesis of BST nanoparticles using the supercritical fluid technology and, on the other hand, the nonpyrolytic spray coating of thin films using colloidal nanocrystals as ink. The authors focus on the deposition process of thin and uniform layer. A dispersed colloidal suspension based on BST nanoparticles is deposited on a hot copper substrate. A 200 nm thick dielectric film is successfully obtained. Electrical characterizations of Cu/BST/Al MIM structure demonstrate a state‐of‐the‐art capacitance density almost reaching 1 µF cm−2 within an operating voltage range of ±1 V. Moreover, an annealing process of the dielectric layer and the final MIM capacitor at 90 °C during 15 h brings a significant decrease of the leakage current by three decades from mA cm−2 to µA cm−2.Read less <
Origin
Hal imported