DEBÉDA, Hélène; NGUYEN, Van Son; CLÉMENT, Pierrick; JUBERA, Veronique; LLOBET, Eduard

doi:10.1016/j.matpr.2018.10.421

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DEBÉDA, Hélène
Laboratoire de l'intégration, du matériau au système [IMS]

NGUYEN, Van Son
Laboratoire de l'intégration, du matériau au système [IMS]

CLÉMENT, Pierrick
Laboratoire de l'intégration, du matériau au système [IMS]
Universitat Rovira i Virgili

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Materials Today: Proceedings. 2019, vol. 6, p. 306-309

Elsevier

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New generation of room temperature screen-printed gas sensors based on either gas sensitive semiconductive ZnO nanoparticles or on free-standing cantilevers coated with a carbon nanotube sensitive layer are herein proposed. The first type is using ZnO nanoparticles printed and sintered at 400°C on interdigitated Pt electrodes. Instead of UV LED activation giving a sensitivity improvement at room temperature, halogen lighting activation yields a good sensitivity, comparable to those given in the literature. The second type is using resonating MEMS based on piezoelectric Au/PZT/Au cantilevers coated with CNTs.. In this case, another transducing mechanism is added onto the cantilever thanks to a top interdigitated electrodes allowing both the simultaneous measurement of the resonance frequency shifts of the cantilever and the resistance variations of the resistive sensitive coating.< Leer menos

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Printed transducers using nanomaterials for gas sensing

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