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hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDEBÉDA, Hélène
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorNGUYEN, Van Son
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
hal.structure.identifierUniversitat Rovira i Virgili
dc.contributor.authorCLÉMENT, Pierrick
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorJUBERA, Veronique
hal.structure.identifierUniversitat Rovira i Virgili
dc.contributor.authorLLOBET, Eduard
dc.date.issued2019
dc.identifier.issn2214-7853
dc.description.abstractEnNew generation of room temperature screen-printed gas sensors based on either gas sensitive semiconductive ZnO nanoparticles or on free-standing cantilevers coated with a carbon nanotube sensitive layer are herein proposed. The first type is using ZnO nanoparticles printed and sintered at 400°C on interdigitated Pt electrodes. Instead of UV LED activation giving a sensitivity improvement at room temperature, halogen lighting activation yields a good sensitivity, comparable to those given in the literature. The second type is using resonating MEMS based on piezoelectric Au/PZT/Au cantilevers coated with CNTs.. In this case, another transducing mechanism is added onto the cantilever thanks to a top interdigitated electrodes allowing both the simultaneous measurement of the resonance frequency shifts of the cantilever and the resistance variations of the resistive sensitive coating.
dc.language.isoen
dc.publisherElsevier
dc.title.enPrinted transducers using nanomaterials for gas sensing
dc.typeArticle de revue
dc.identifier.doi10.1016/j.matpr.2018.10.421
dc.subject.halSciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
bordeaux.journalMaterials Today: Proceedings
bordeaux.page306-309
bordeaux.volume6
bordeaux.peerReviewedoui
hal.identifierhal-02133410
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-02133410v1
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