The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS
RUA-TABORDA, Maria-Isabel
Laboratoire de l'intégration, du matériau au système [IMS]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
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Laboratoire de l'intégration, du matériau au système [IMS]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
RUA-TABORDA, Maria-Isabel
Laboratoire de l'intégration, du matériau au système [IMS]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
< Reduce
Laboratoire de l'intégration, du matériau au système [IMS]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Language
en
Article de revue
This item was published in
Ceramics. 2020-11-16, vol. 3, n° 4, p. 453-475
MDPI
English Abstract
Piezoelectric thick films are of real interest for devices such as ceramic Micro-ElectroMechanical Systems (MEMS) because they bridge the gap between thin films and bulk ceramics. The basic design of MEMS includes electrodes, ...Read more >
Piezoelectric thick films are of real interest for devices such as ceramic Micro-ElectroMechanical Systems (MEMS) because they bridge the gap between thin films and bulk ceramics. The basic design of MEMS includes electrodes, a functional material, and a substrate, and efforts are currently focused on simplified processes. In this respect, screen-printing combined with a sacrificial layer approach is attractive due to its low cost and the wide range of targeted materials. Both the role and the nature of the sacrificial layer, usually a carbon or mineral type, depend on the process and the final device. First, a sacrificial layer method dedicated to screen-printed thick-film ceramic and LTCC MEMS is presented. Second, the recent processing of piezoelectric thick-film ceramic MEMS using spark plasma sintering combined with a protective layer approach is introduced. Whatever the approach, the focus is on the interdependent effects of the microstructure, chemistry, and strain/stress, which need to be controlled to ensure reliable and performant properties of the multilayer electroceramics. Here the goal is to highlight the benefits and the large perspectives of using sacrificial/protective layers, with an emphasis on the pros and cons of such a strategy when targeting a complex piezoelectric MEMS design.Read less <
English Keywords
sacrificial layer
protective layer
thick film
screen-printing
spark plasma sintering
piezoelectric
carbonate
Origin
Hal imported