FABREGUETTE, F.; MAGLIONE, Mario; CLERC, J. P.; BOURGEOIS, S.; SACILOTTI, M.

doi:10.1088/0953-8984/14/34/309

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FABREGUETTE, F.
Laboratoire de Physique de l'Université de Bourgogne [LPUB]
Laboratoire de Recherche sur la Réactivité des Solides [LRRS]

MAGLIONE, Mario
Laboratoire de Physique de l'Université de Bourgogne [LPUB]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]

CLERC, J. P.
Institut universitaire des systèmes thermiques industriels [IUSTI]

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Journal of Physics: Condensed Matter. 2002, vol. 14, n° 34, p. 7911-7917

IOP Publishing

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We report the percolation behaviour of the conductivity of titanium oxynitride films grown by low-pressure metal-organic chemical vapour deposition, composed of TiNxOy mixed with TiO2. The usual DC parameters (t, s and Φc), obtained from the effective media theory equations, are compared to the universal values (s = sun while t < tun because of the film anisotropy). This is the first example of an electrical continuum percolation applied to columnar films with chemically similar conducting and insulating units (non-heterogeneous percolation) whose mixing is based upon the growth temperature during the film growth.< Leer menos

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Chemical vapor deposition

Low pressure

Titanium

Oxynitride

Percolation

Conductivity

Thin films

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Anisotropic and non-heterogeneous continuum percolation in titanium oxynitride thin columnar films

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