Anisotropic and non-heterogeneous continuum percolation in titanium oxynitride thin columnar films
hal.structure.identifier | Laboratoire de Physique de l'Université de Bourgogne [LPUB] | |
hal.structure.identifier | Laboratoire de Recherche sur la Réactivité des Solides [LRRS] | |
dc.contributor.author | FABREGUETTE, F. | |
hal.structure.identifier | Laboratoire de Physique de l'Université de Bourgogne [LPUB] | |
hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
dc.contributor.author | MAGLIONE, Mario | |
hal.structure.identifier | Institut universitaire des systèmes thermiques industriels [IUSTI] | |
dc.contributor.author | CLERC, J. P. | |
hal.structure.identifier | Laboratoire de Recherche sur la Réactivité des Solides [LRRS] | |
dc.contributor.author | BOURGEOIS, S. | |
hal.structure.identifier | Laboratoire de Physique de l'Université de Bourgogne [LPUB] | |
dc.contributor.author | SACILOTTI, M. | |
dc.date.issued | 2002 | |
dc.identifier.issn | 0953-8984 | |
dc.description.abstractEn | We report the percolation behaviour of the conductivity of titanium oxynitride films grown by low-pressure metal-organic chemical vapour deposition, composed of TiNxOy mixed with TiO2. The usual DC parameters (t, s and Φc), obtained from the effective media theory equations, are compared to the universal values (s = sun while t < tun because of the film anisotropy). This is the first example of an electrical continuum percolation applied to columnar films with chemically similar conducting and insulating units (non-heterogeneous percolation) whose mixing is based upon the growth temperature during the film growth. | |
dc.language.iso | en | |
dc.publisher | IOP Publishing | |
dc.subject.en | Chemical vapor deposition | |
dc.subject.en | Low pressure | |
dc.subject.en | Titanium | |
dc.subject.en | Oxynitride | |
dc.subject.en | Percolation | |
dc.subject.en | Conductivity | |
dc.subject.en | Thin films | |
dc.title.en | Anisotropic and non-heterogeneous continuum percolation in titanium oxynitride thin columnar films | |
dc.type | Article de revue | |
dc.identifier.doi | 10.1088/0953-8984/14/34/309 | |
dc.subject.hal | Chimie/Matériaux | |
bordeaux.journal | Journal of Physics: Condensed Matter | |
bordeaux.page | 7911-7917 | |
bordeaux.volume | 14 | |
bordeaux.issue | 34 | |
bordeaux.peerReviewed | oui | |
hal.identifier | hal-00732473 | |
hal.version | 1 | |
hal.popular | non | |
hal.audience | Internationale | |
hal.origin.link | https://hal.archives-ouvertes.fr//hal-00732473v1 | |
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