TRL-calibration Standards with Emphasis on Crosstalk Reduction
Langue
EN
Communication dans un congrès avec actes
Ce document a été publié dans
14th Global Symposium on Millimeter-Waves and Terahertz, GSMM 2022, 2022-05-18, Seoul. 2022-05-18
IEEE
Résumé en anglais
We present an innovative “shifted RF Pad” TRL on–wafer calibration kit to minimize the impact of crosstalk. The impact of the crosstalk in on-wafer measurement up to 330 GHz is observable by comparing results of DUTs ...Lire la suite >
We present an innovative “shifted RF Pad” TRL on–wafer calibration kit to minimize the impact of crosstalk. The impact of the crosstalk in on-wafer measurement up to 330 GHz is observable by comparing results of DUTs obtained using the shifted and conventional RF pad calibration kit during calibration. Use of shifted RF pad structures shows improvement in measured DUT characteristics owing to reduced crosstalk. In addition, simulation results obtained using EM simulator, TCAD and SPICE models are employed to analyze the on-wafer measurement of DUTs.< Réduire
Mots clés en anglais
S-paramater measurement
Semiconductor Devices
HBT
Sub-THz frequency
THz frequency
on-wafer TRL calibration
calibration kit structures design
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