Browsing IMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218 by Author "NICU, Liviu"
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H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
DUFOUR, Isabelle; IGLESIAS HERNANDEZ, Luis; SHANMUGAM, Priyadarshini ...(H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility, 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), fr, Paris, 2022-04)Communication dans un congrès avec actesOpen access -
A Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression Bonding
JUAREZ, Dolores Manrique; MATHIEU, Fabrice; LIBAUDE, Guillaume ...Actes de congrès/ProceedingsOpen access