Browsing Laboratoire de Chimie des Polymères Organiques (LCPO) - UMR 5629 by Author "XU, K."
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Recent Achievements in sub-10 nm DSA lithography for Line/Space patterning
NAVARRO, C.; NICOLET, C.; ARIURA, F. ...(34th International Conference of Photopolymer Science and Technology, JP, chiba)Communication dans un congrès avec actes -
Recent Achievements in sub-10 nm DSA lithography for Line/Space patterning
NAVARRO, C.; NICOLET, C.; ARIURA, F. ...(Journal of Photopolymer Science and Technology. vol. 30, pp. 69-75, 2017)Article de revue