LEDAIN, Olivier; WOELFFEL, Wilfrid; ROGER, Jerome; VIGNOLES, Gerard; MAILLE, Laurence; JACQUES, Sylvain

doi:10.1016/j.phpro.2013.07.048

LEDAIN, Olivier
Laboratoire des Composites Thermostructuraux [LCTS]

WOELFFEL, Wilfrid
Laboratoire des Composites Thermostructuraux [LCTS]

ROGER, Jerome

Laboratoire des Composites Thermostructuraux [LCTS]

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Article de revue

Ce document a été publié dans

Physics Procedia. 2013, vol. 46, p. 79-87

Résumé en anglais

In Reactive Chemical Vapour Deposition (RCVD), the absence of one element of the deposited carbide in the initial gas phase involves the consumption/conversion of the solid substrate. In this way, the growth of a continuous carbide layer on the substrate requires solid-phase diffusion of the reagent. In this work, a parametric study of the RCVD of titanium carbide from pyrocarbon (PyC) and an H2-TiCl4 mixture has been carried out. Conversion ratio, PyC consumption and carbide layer growth kinetics have been determined at 1000°C. The influence of the H2/TiCl 4 dilution ratio has been also investigated. The apparent inter-diffusion coefficient of the carbon through the TiC deposited layer and the direct apparent reaction rate were determined from a comparison between simulations based on a Deal-Grove-type model and the experimental results. The study has been completed with FTIR spectrometry analyses of the gases.< Réduire

Mots clés en anglais

CVD

R-CVD

TiC coating

Pyrocarbon

Solid state diffusion

FTIR

Simulation

URI

https://oskar-bordeaux.fr/handle/20.500.12278/184501

DOI

http://dx.doi.org/10.1016/j.phpro.2013.07.048

Unités de recherche

Laboratoire des Composites Thermo Structuraux (LCTS) - UMR 5801

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Reactive Chemical Vapour Deposition of titanium carbide from H2-TiCl4 gas mixture on pyrocarbon: A comprehensive study

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Résumé en anglais

Mots clés en anglais

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DOI

Unités de recherche